Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10719928 | Pattern inspection apparatus and pattern inspection method | Riki Ogawa | 2020-07-21 |
| 10386308 | Pattern inspection apparatus for detecting a pattern defect | Riki Ogawa | 2019-08-20 |
| 10222341 | Focusing apparatus, focusing method, and pattern inspection method | Riki Ogawa | 2019-03-05 |
| 9410899 | Illumination apparatus and pattern inspection apparatus | Riki Ogawa | 2016-08-09 |
| 9036143 | Inspection apparatus and inspection method | Yasuhiro Yamashita, Riki Ogawa | 2015-05-19 |