Issued Patents All Time
Showing 51–64 of 64 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8004655 | Automatic focus adjusting mechanism and optical image acquisition apparatus | Masataka Shiratsuchi, Yoshinori Honguh, Masatoshi Hirono, Shinji Sugihara | 2011-08-23 |
| 7911599 | Reticle defect inspection apparatus and reticle defect inspection method | Toshiyuki Watanabe | 2011-03-22 |
| 7894051 | Reticle defect inspection apparatus and reticle defect inspection method | Ryoichi Hirano | 2011-02-22 |
| 7760349 | Mask-defect inspecting apparatus with movable focusing lens | Akihiko Sekine, Ikunao Isomura, Toshiyuki Watanabe, Shinji Sugihara | 2010-07-20 |
| 7551273 | Mask defect inspection apparatus | Akihiko Sekine, Ikunao Isomura, Toshiyuki Watanabe, Shinji Sugihara | 2009-06-23 |
| 7508526 | Defect inspecting apparatus | Toru Tojo, Munehiro Ogasawara | 2009-03-24 |
| 7495779 | Level detection apparatus | — | 2009-02-24 |
| 7491959 | Defect inspection apparatus | Soichiro Mitsui | 2009-02-17 |
| 7388660 | Light amount measurement device and light amount measurement method | Noboru Kobayashi, Masayuki Hideshima, Hiroyuki Nagahama, Koji Nakajima | 2008-06-17 |
| 7379176 | Mask defect inspection apparatus | Akihiko Sekine, Ikunao Isomura, Toshiyuki Watanabe, Shinji Sugihara | 2008-05-27 |
| 7359043 | Pattern inspecting method and pattern inspecting apparatus | Hideo Tsuchiya, Yoshihide Kato, Kazuto Matsuki, Yasushi Sanada, Takuro Nagao | 2008-04-15 |
| 7345755 | Defect inspecting apparatus and defect inspection method | Toru Tojo | 2008-03-18 |
| 7123345 | Automatic focusing apparatus | Shinji Sugihara, Toru Tojo | 2006-10-17 |
| 6909501 | Pattern inspection apparatus and pattern inspection method | Yasushi Sanada, Mitsuo Tabata | 2005-06-21 |