Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11443419 | Reference image generation method and pattern inspection method | Yoshitaka Yasui | 2022-09-13 |
| 10578560 | Inspection apparatus and method for detecting false defects | Hiroteru Akiyama | 2020-03-03 |
| 10290094 | Pattern inspection apparatus and pattern inspection method | — | 2019-05-14 |
| 10026011 | Mask inspection apparatus, mask evaluation method and mask evaluation system | Hideo Tsuchiya, Nobutaka Kikuiri | 2018-07-17 |
| 9811896 | Measuring apparatus | Nobutaka Kikuiri | 2017-11-07 |
| 9767547 | Inspection method and inspection apparatus | Masaya Takeda | 2017-09-19 |
| 9728373 | Pattern inspection apparatus and pattern inspection method | Nobutaka Kikuiri | 2017-08-08 |
| 9659361 | Measuring apparatus that generates positional deviation distribution of a pattern on a target object | Nobutaka Kikuiri | 2017-05-23 |
| 9626755 | Mask inspection apparatus and mask inspection method | Hideo Tsuchiya, Nobutaka Kikuiri | 2017-04-18 |
| 9535015 | Pattern inspection method and pattern inspection apparatus | — | 2017-01-03 |
| 9235883 | Inspection system and method | Takafumi Inoue, Nobutaka Kikuiri | 2016-01-12 |
| 9230317 | Inspection method and inspection apparatus | Yoshitaka Yasui | 2016-01-05 |
| 8861832 | Inspection system and method | Takafumi Inoue, Eiji Matsumoto, Nobutaka Kikuiri | 2014-10-14 |
| 8442320 | Pattern inspection apparatus and pattern inspection method | Ryoichi Hirano, Nobutaka Kikuiri | 2013-05-14 |
| 8254663 | Ultrafine lithography pattern inspection using multi-stage TDI image sensors with false image removability | Akira Kataoka, Ryoichi Hirano, Nobutaka Kikuiri, Susumu Iida | 2012-08-28 |
| 7760349 | Mask-defect inspecting apparatus with movable focusing lens | Akihiko Sekine, Toshiyuki Watanabe, Shinji Sugihara, Riki Ogawa | 2010-07-20 |
| 7664308 | Photomask inspection apparatus comparing optical proximity correction patterns to minimum and maximum limits | — | 2010-02-16 |
| 7639863 | Die-to-database photomask defect detection using region data to modify inspection thresholds | — | 2009-12-29 |
| 7630535 | Die-to-die photomask defect detection using region data to modify inspection thresholds | — | 2009-12-08 |
| 7590277 | Pattern inspecting method | Junji Oaki, Shinji Sugihara, Toru Tojo | 2009-09-15 |
| 7551273 | Mask defect inspection apparatus | Akihiko Sekine, Toshiyuki Watanabe, Shinji Sugihara, Riki Ogawa | 2009-06-23 |
| 7551767 | Pattern inspection apparatus | Hideo Tsuchiya, Kyoji Yamashita, Toshiyuki Watanabe, Toru Tojo, Yasushi Sanada | 2009-06-23 |
| 7526119 | Pattern inspection apparatus | Toru Tojo | 2009-04-28 |
| 7522276 | Pattern inspection method | Toru Tojo, Toshiyuki Watanabe, Akihiko Sekine | 2009-04-21 |
| 7421109 | Pattern inspection apparatus | Hideo Tsuchiya, Kyoji Yamashita, Toshiyuki Watanabe, Toru Tojo, Yasushi Sanada | 2008-09-02 |