Issued Patents All Time
Showing 1–25 of 47 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7590277 | Pattern inspecting method | Junji Oaki, Shinji Sugihara, Ikunao Isomura | 2009-09-15 |
| 7551767 | Pattern inspection apparatus | Hideo Tsuchiya, Kyoji Yamashita, Toshiyuki Watanabe, Ikunao Isomura, Yasushi Sanada | 2009-06-23 |
| 7526119 | Pattern inspection apparatus | Ikunao Isomura | 2009-04-28 |
| 7522276 | Pattern inspection method | Toshiyuki Watanabe, Ikunao Isomura, Akihiko Sekine | 2009-04-21 |
| 7508526 | Defect inspecting apparatus | Riki Ogawa, Munehiro Ogasawara | 2009-03-24 |
| 7421109 | Pattern inspection apparatus | Hideo Tsuchiya, Kyoji Yamashita, Toshiyuki Watanabe, Ikunao Isomura, Yasushi Sanada | 2008-09-02 |
| 7415149 | Pattern inspection apparatus | Hideo Tsuchiya, Kyoji Yamashita, Toshiyuki Watanabe, Ikunao Isomura, Yasushi Sanada | 2008-08-19 |
| 7372560 | Pattern inspection apparatus | Toshiyuki Watanabe, Ikunao Isomura, Akihiko Sekine | 2008-05-13 |
| 7359546 | Defect inspection apparatus and defect inspection method | Shinji Sugihara, Ikunao Isomura, Junji Oaki | 2008-04-15 |
| 7345755 | Defect inspecting apparatus and defect inspection method | Riki Ogawa | 2008-03-18 |
| 7304730 | Inspection apparatus having two sensors, method for inspecting an object, and a method for manufacturing a photolithography mask | Hiromu Inoue, Takehiko Nomura, Shinichi Imai | 2007-12-04 |
| 7123345 | Automatic focusing apparatus | Shinji Sugihara, Riki Ogawa | 2006-10-17 |
| 7075621 | Alignment method | Soichiro Mitsui, Kiminobu Akeno | 2006-07-11 |
| 6901314 | Alignment apparatus for substrates | Soichiro Mitsui, Kiminobu Akeno | 2005-05-31 |
| 6676289 | Temperature measuring method in pattern drawing apparatus | Ryoichi Hirano, Shusuke Yoshitake, Shuichiro Fukutome, Teruaki Yamamoto, Masaki Toriumi | 2004-01-13 |
| 6411023 | Vacuum processing apparatus and ion pump capable of suppressing leakage of ions and electrons from ion pump | Katsuhito Ogura, Ryoichi Hirano | 2002-06-25 |
| 6346354 | Pattern writing method | Takayuki Abe, Hirohito Anze, Susumu Oogi, Mitsuko Shimizu, Hideo Inoue +5 more | 2002-02-12 |
| 6281510 | Sample transferring method and sample transfer supporting apparatus | Shusuke Yoshitake, Yoshiaki Tsukumo, Ryoichi Hirano, Yoshiaki Tada, Makoto Kanda | 2001-08-28 |
| 6239443 | Apparatus for emitting a beam to a sample used for manufacturing a semiconducor device | Ryoichi Hirano, Susumu Saito, Hitoshi Suzuki, Kazuo Abe, Shinya Watanabe | 2001-05-29 |
| 6182369 | Pattern forming apparatus | Ryoichi Hirano, Shusuke Yoshitake, Kazuto Matsuki | 2001-02-06 |
| 6100970 | Apparatus for inspecting slight defects on a photomask pattern | Hisakazu Yoshino, Akihiko Sekine, Mitsuo Tabata | 2000-08-08 |
| 6090176 | Sample transferring method and sample transfer supporting apparatus | Shusuke Yoshitake, Yoshiaki Tsukumo, Ryoichi Hirano, Yoshiaki Tada, Makoto Kanda | 2000-07-18 |
| 6084716 | Optical substrate inspection apparatus | Yasushi Sanada, Mitsuo Tabata, Kyoji Yamashita, Hideo Nagai, Noboru Kobayashi +3 more | 2000-07-04 |
| 6080990 | Position measuring apparatus | Shinya Watanabe, Hitoshi Suzuki, Kazuo Abe, Susumu Saito, Ryoichi Hirano | 2000-06-27 |
| 5960106 | Sample inspection apparatus and sample inspection method | Hideo Tsuchiya, Mitsuo Tabata, Toshiyuki Watanabe, Eiichi Kobayashi | 1999-09-28 |