Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11266999 | Dust-collecting apparatus | Yosuke Takahashi, Yuji Abe | 2022-03-08 |
| 11049688 | Charged particle beam irradiation apparatus | Michihiro Kawaguchi, Keita Ideno, Kota Iwasaki, Keisuke Goto, Kiyoshi Nakaso +4 more | 2021-06-29 |
| 10607810 | Vibration control system and optical equipment equipped therewith | Michihiro Kawaguchi, Kiyoshi Nakaso, Keita Ideno, Shintaro Yamamoto, Keisuke Goto +4 more | 2020-03-31 |
| 10373793 | Conductive contact point pin and charged particle beam apparatus | Michihiro Kawaguchi, Kenichi Kataoka, Tomoki UMETSU | 2019-08-06 |
| 8987683 | Charged particle beam drawing apparatus and charged particle beam drawing method | Michihiro Kawaguchi, Yoshinori Kagawa, Yu Asami, Keisuke Yamaguchi | 2015-03-24 |
| 8847178 | Charged particle beam writing apparatus and charged particle beam writing method | Michihiro Kawaguchi, Kazuhiro Shiba, Keisuke Yamaguchi, Yoshinori Kagawa | 2014-09-30 |
| 8779397 | Substrate cover and charged particle beam writing method using same | Michihiro Kawaguchi, Keisuke Yamaguchi, Shun Kanezawa, Soichiro Mitsui | 2014-07-15 |
| 7528393 | Charged particle beam processing apparatus | — | 2009-05-05 |
| 7075621 | Alignment method | Soichiro Mitsui, Toru Tojo | 2006-07-11 |
| 6901314 | Alignment apparatus for substrates | Soichiro Mitsui, Toru Tojo | 2005-05-31 |
| 6617592 | Charged particle beam system and chamber of charged particle beam system | Jun Takamatsu, Kiyoshi Hattori, Hitoshi Sunaoshi, Naoharu Shimomura, Munehiro Ogasawara | 2003-09-09 |
| 5602645 | Pattern evaluation apparatus and a method of pattern evaluation | Mitsuo Tabata, Toru Tojo, Toshiyuki Watanabe, Tomohide Watanabe, Eiji Yamanaka +2 more | 1997-02-11 |