Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9299531 | Mask cover, charged particle beam drawing apparatus and charged particle beam drawing method | Michihiro Kawaguchi | 2016-03-29 |
| 8987683 | Charged particle beam drawing apparatus and charged particle beam drawing method | Michihiro Kawaguchi, Kiminobu Akeno, Yoshinori Kagawa, Keisuke Yamaguchi | 2015-03-24 |