Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142512 | Vacuum apparatus | Yoshiaki Shinohara | 2024-11-12 |
| 11049688 | Charged particle beam irradiation apparatus | Kiminobu Akeno, Keita Ideno, Kota Iwasaki, Keisuke Goto, Kiyoshi Nakaso +4 more | 2021-06-29 |
| 10607810 | Vibration control system and optical equipment equipped therewith | Kiminobu Akeno, Kiyoshi Nakaso, Keita Ideno, Shintaro Yamamoto, Keisuke Goto +4 more | 2020-03-31 |
| 10373793 | Conductive contact point pin and charged particle beam apparatus | Kiminobu Akeno, Kenichi Kataoka, Tomoki UMETSU | 2019-08-06 |
| 10129985 | Substrate cover | — | 2018-11-13 |
| 9895513 | Catheter | — | 2018-02-20 |
| 9299531 | Mask cover, charged particle beam drawing apparatus and charged particle beam drawing method | Yu Asami | 2016-03-29 |
| 8987683 | Charged particle beam drawing apparatus and charged particle beam drawing method | Kiminobu Akeno, Yoshinori Kagawa, Yu Asami, Keisuke Yamaguchi | 2015-03-24 |
| 8912513 | Charged particle beam writing apparatus and charged particle beam writing method | Kentaro Omi, Keisuke Yamaguchi | 2014-12-16 |
| 8847178 | Charged particle beam writing apparatus and charged particle beam writing method | Kazuhiro Shiba, Keisuke Yamaguchi, Kiminobu Akeno, Yoshinori Kagawa | 2014-09-30 |
| 8779397 | Substrate cover and charged particle beam writing method using same | Keisuke Yamaguchi, Shun Kanezawa, Soichiro Mitsui, Kiminobu Akeno | 2014-07-15 |
| 8237139 | Method for detecting substrate position of charged particle beam photolithography apparatus and charged particle beam photolithography apparatus | Kota FUJIWARA, Yoshiro Yamanaka, Kazuhiro Shiba | 2012-08-07 |