Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11275044 | Anomaly determination method and writing apparatus | — | 2022-03-15 |
| 8779397 | Substrate cover and charged particle beam writing method using same | Michihiro Kawaguchi, Keisuke Yamaguchi, Soichiro Mitsui, Kiminobu Akeno | 2014-07-15 |