Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8779397 | Substrate cover and charged particle beam writing method using same | Michihiro Kawaguchi, Keisuke Yamaguchi, Shun Kanezawa, Kiminobu Akeno | 2014-07-15 |
| 7704645 | Method of generating writing pattern data of mask and method of writing mask | — | 2010-04-27 |
| 7495248 | Position detecting apparatus and position detecting method | Hideki Ito | 2009-02-24 |
| 7491959 | Defect inspection apparatus | Riki Ogawa | 2009-02-17 |
| 7075621 | Alignment method | Toru Tojo, Kiminobu Akeno | 2006-07-11 |
| 6901314 | Alignment apparatus for substrates | Toru Tojo, Kiminobu Akeno | 2005-05-31 |
| 6078641 | X-ray lithography system and x-ray lithography method | Kenichi Murooka | 2000-06-20 |