Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11456156 | Charged particle beam apparatus | Keisuke Goto | 2022-09-27 |
| 11049688 | Charged particle beam irradiation apparatus | Michihiro Kawaguchi, Kiminobu Akeno, Keita Ideno, Kota Iwasaki, Keisuke Goto +4 more | 2021-06-29 |
| 10607810 | Vibration control system and optical equipment equipped therewith | Michihiro Kawaguchi, Kiminobu Akeno, Keita Ideno, Shintaro Yamamoto, Keisuke Goto +4 more | 2020-03-31 |
| 7640142 | Position measurement apparatus and method and pattern forming apparatus and writing method | Yuichi Tachikawa, Kazumichi Yasui, Kiyoshi Hattori, Tsugiyuki Okuya, Makoto Mita | 2009-12-29 |