Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7640142 | Position measurement apparatus and method and pattern forming apparatus and writing method | Kazumichi Yasui, Kiyoshi Nakaso, Kiyoshi Hattori, Tsugiyuki Okuya, Makoto Mita | 2009-12-29 |
| 7608528 | Substrate cover, and charged particle beam writing apparatus and method | — | 2009-10-27 |