Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11049688 | Charged particle beam irradiation apparatus | Michihiro Kawaguchi, Kiminobu Akeno, Kota Iwasaki, Keisuke Goto, Kiyoshi Nakaso +4 more | 2021-06-29 |
| 10867769 | Vacuum apparatus and charged particle beam writing apparatus | Tetsuro Nishiyama, Hiroyasu Saito | 2020-12-15 |
| 10607810 | Vibration control system and optical equipment equipped therewith | Michihiro Kawaguchi, Kiminobu Akeno, Kiyoshi Nakaso, Shintaro Yamamoto, Keisuke Goto +4 more | 2020-03-31 |
| 9466465 | Charged particle beam drawing apparatus | — | 2016-10-11 |