Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867769 | Vacuum apparatus and charged particle beam writing apparatus | Keita Ideno, Hiroyasu Saito | 2020-12-15 |
| 9449792 | Charged particle beam writing apparatus, aperture unit, and charged particle beam writing method | — | 2016-09-20 |
| 7521689 | Deflector for equipment of electron beam lithography and equipment of electron beam lithography | Yoshimasa Sanmiya, Kenji Ohtoshi | 2009-04-21 |