Issued Patents All Time
Showing 1–25 of 72 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400825 | Multi-electron beam image acquisition apparatus, multi-electron beam inspection apparatus, and multi-electron beam image acquisition method | Kazuhiko Inoue | 2025-08-26 |
| 12009174 | Drawing apparatus and deflector | Kazuhiro Kishi | 2024-06-11 |
| 11804361 | Charged particle beam writing method, charged particle beam writing apparatus, and computer-readable recording medium | Haruyuki NOMURA, Noriaki Nakayamada | 2023-10-31 |
| 11694868 | Multi-beam image acquisition apparatus and multi-beam image acquisition method | Kazuhiko Inoue, Atsushi Ando | 2023-07-04 |
| 11605523 | Aberration corrector and multiple electron beam irradiation apparatus | Kazuhiko Inoue | 2023-03-14 |
| 11417495 | Multi-charged particle beam irradiation apparatus and multi-charged particle beam inspection apparatus | Kazuhiko Inoue, Masataka Shiratsuchi | 2022-08-16 |
| 11145485 | Multiple electron beams irradiation apparatus | Kazuhiko Inoue, Atsushi Ando, John G. Hartley | 2021-10-12 |
| 11139138 | Multiple electron beams irradiation apparatus | Kazuhiko Inoue, Atsushi Ando, John G. Hartley | 2021-10-05 |
| 10998164 | Charged particle beam writing apparatus and charged particle beam writing method | Takanao Touya, Hirofumi Morita | 2021-05-04 |
| 10998162 | Charged-particle beam apparatus, charged-particle beam writing apparatus, and charged-particle beam controlling method | Nobuo Miyamoto | 2021-05-04 |
| 10950410 | Multiple electron beam inspection apparatus with through-hole with spiral shape | Kazuhiko Inoue, Atsushi Ando | 2021-03-16 |
| 10886102 | Multiple electron beam irradiation apparatus, multiple electron beam irradiation method, and multiple electron beam inspection apparatus | Kazuhiko Inoue, Steven D. Golladay | 2021-01-05 |
| 10790110 | Charged particle beam irradiation apparatus, charged particle beam image acquisition apparatus, and charged particle beam inspection apparatus | — | 2020-09-29 |
| 10784081 | Charged particle beam lithography apparatus and charged particle beam pattern writing method | — | 2020-09-22 |
| 10784073 | Blanking deflector, and multi charged particle beam writing apparatus using three deflector electrodes and a transmission line | — | 2020-09-22 |
| 10734190 | Multiple electron beam irradiation apparatus, multiple electron beam inspection apparatus and multiple electron beam irradiation method | Atsushi Ando, Riki Ogawa, John G. Hartley | 2020-08-04 |
| 10685809 | Charged particle beam lithography apparatus and charged particle beam pattern writing method | — | 2020-06-16 |
| 10629406 | Optical system adjustment method of image acquisition apparatus | Nobutaka Kikuiri, Atsushi Ando | 2020-04-21 |
| 10622186 | Charged particle beam writing apparatus and charged particle beam writing method | Takuya Uemura, Takashi Nakamura, Hideki Matsui, Rieko Nishimura, Tatsuya MUROFUSHI +1 more | 2020-04-14 |
| 10504686 | Charged particle beam writing method and charged particle beam writing apparatus | Takanao Touya | 2019-12-10 |
| 10451976 | Electron beam irradiation apparatus and electron beam dynamic focus adjustment method | — | 2019-10-22 |
| RE47561 | Multi charged particle beam writing method and multi charged particle beam writing apparatus | Ryoichi Yoshikawa | 2019-08-06 |
| 10283316 | Aperture for inspecting multi beam, beam inspection apparatus for multi beam, and multi charged particle beam writing apparatus | Hiroshi Yamashita | 2019-05-07 |
| 10224172 | Multi-beam optical system adjustment method, and multi-beam exposure apparatus | Hirofumi Morita | 2019-03-05 |
| 10224171 | Blanking device for multi charged particle beams, and multi charged particle beam irradiation apparatus | Takanao Touya, Hiroshi Matsumoto, Hirofumi Morita | 2019-03-05 |