Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12249483 | Charged particle beam writing method and charged particle beam writing apparatus | — | 2025-03-11 |
| 11961708 | Charged particle beam writing apparatus, charged particle beam writing method, and a non-transitory computer-readable storage medium | Noriaki Nakayamada | 2024-04-16 |
| 11804361 | Charged particle beam writing method, charged particle beam writing apparatus, and computer-readable recording medium | Noriaki Nakayamada, Munehiro Ogasawara | 2023-10-31 |
| 10699877 | Charged-particle beam writing apparatus and charged-particle beam writing method | Takashi Kamikubo | 2020-06-30 |
| 10488760 | Method for acquiring parameter for dose correction of charged particle beam, charged particle beam writing method, and charged particle beam writing apparatus | — | 2019-11-26 |
| 10460909 | Charged particle beam writing method and charged particle beam writing apparatus | — | 2019-10-29 |
| 10114290 | Method for acquiring parameter for dose correction of charged particle beam, charged particle beam writing method, and charged particle beam writing apparatus | — | 2018-10-30 |
| 9673018 | Charged particle beam writing apparatus and charged particle beam writing method | — | 2017-06-06 |
| 9336980 | Electron beam writing apparatus, and method for adjusting convergence half angle of electron beam | — | 2016-05-10 |