Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11961708 | Charged particle beam writing apparatus, charged particle beam writing method, and a non-transitory computer-readable storage medium | Haruyuki NOMURA | 2024-04-16 |
| 11804361 | Charged particle beam writing method, charged particle beam writing apparatus, and computer-readable recording medium | Haruyuki NOMURA, Munehiro Ogasawara | 2023-10-31 |
| 11789372 | Writing data generating method and multi charged particle beam writing apparatus | Kenichi Yasui | 2023-10-17 |
| 11774860 | Writing data generating method, multi charged particle beam writing apparatus, pattern inspecting apparatus, and computer-readable recording medium | Kenichi Yasui | 2023-10-03 |
| 11327408 | Writing data generating method and multi charged particle beam writing apparatus | Kenichi Yasui | 2022-05-10 |
| 11199781 | Writing data generating method, multi charged particle beam writing apparatus, pattern inspecting apparatus, and computer-readable recording medium | Kenichi Yasui | 2021-12-14 |
| 10950413 | Electron beam irradiation method, electron beam irradiation apparatus, and computer readable non-transitory storage medium | — | 2021-03-16 |
| 10685435 | Drawing data generating method | Shigehiro Hara, Kenichi Yasui | 2020-06-16 |
| 10410830 | Charged particle beam apparatus and positional displacement correcting method of charged particle beam | — | 2019-09-10 |
| 10236160 | Electron beam apparatus and positional displacement correcting method of electron beam | — | 2019-03-19 |
| 10032603 | Charged particle beam lithography apparatus and charged particle beam lithography method | Mizuna Suganuma | 2018-07-24 |
| 9852885 | Charged particle beam writing method, and charged particle beam writing apparatus | Mizuna Suganuma | 2017-12-26 |
| 9779913 | Charged particle beam drawing apparatus and drawing data generation method | Shigehiro Hara, Kenichi Yasui, Hiroshi Yamashita, Yasuo Kato, Saori Gomi +4 more | 2017-10-03 |
| 9484185 | Charged particle beam writing apparatus, and charged particle beam writing method | Mizuna Suganuma, Yasuo Kato | 2016-11-01 |
| 9336988 | Multi charged particle beam writing apparatus, and multi charged particle beam writing method | — | 2016-05-10 |
| 9268234 | Charged particle beam lithography apparatus and charged particle beam pattern writing method | — | 2016-02-23 |
| 9224578 | Charged particle beam writing apparatus and method for acquiring dose modulation coefficient of charged particle beam | Yasuo Kato, Mizuna Suganuma | 2015-12-29 |
| 9164044 | Charged particle beam lithography apparatus, inspection apparatus and inspection method of pattern writing data | Shigehiro Hara, Yasuo Kato, Akihito Anpo | 2015-10-20 |
| 8563953 | Charged particle beam writing apparatus and charged particle beam writing method | Makoto Hiramoto, Jun Yashima | 2013-10-22 |
| 8502175 | Charged particle beam pattern forming apparatus and charged particle beam pattern forming method | Seiji Wake, Hideo Inoue, Akihito Anpo | 2013-08-06 |
| 8178856 | Charged particle beam writing apparatus and method thereof | Seiji Wake | 2012-05-15 |
| 8129698 | Charged-particle beam writing method and charged-particle beam writing apparatus | Seiji Wake | 2012-03-06 |
| 7705327 | Beam shot position correction coefficient computation/updating technique for ultrafine pattern fabrication using variable shaped beam lithography | Tomoyuki Horiuchi, Junichi Suzuki, Takeshi Kurohori | 2010-04-27 |
| 7036980 | Apparatus and method for forming pattern | Ryoichi Hirano, Satoshi Imura | 2006-05-02 |
| 6346354 | Pattern writing method | Takayuki Abe, Hirohito Anze, Susumu Oogi, Mitsuko Shimizu, Hideo Inoue +5 more | 2002-02-12 |