Issued Patents All Time
Showing 25 most recent of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10937629 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Hironori Teguri, Yasuo Kato, Masafumi Ise | 2021-03-02 |
| RE47707 | Charged particle beam writing apparatus and charged particle beam writing method | Yasuo Kato, Akihito Anpo | 2019-11-05 |
| 9934935 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Ryoichi Yoshikawa, Hideo Inoue, Hayato Kimura, Yasuo Kato | 2018-04-03 |
| 9875876 | Charged particle beam writing apparatus and charged particle beam writing method | — | 2018-01-23 |
| 9659747 | Method of generating write data for energy beam writing apparatus, method of writing with energy beam, and energy beam writing apparatus | — | 2017-05-23 |
| 9564293 | Charged particle beam writing apparatus, and buffer memory data storage method | Yasuo Kato | 2017-02-07 |
| 9548183 | Charged particle beam writing apparatus, and charged particle beam writing method | — | 2017-01-17 |
| 9188853 | Charged particle beam drawing apparatus and control method thereof | — | 2015-11-17 |
| 9153420 | Charged particle beam writing apparatus and charged particle beam writing method | — | 2015-10-06 |
| 9141750 | Charged particle beam writing apparatus and irradiation time apportionment method of charged particle beams for multiple writing | Akihito Anpo, Yasuo Kato | 2015-09-22 |
| 9006691 | Charged particle beam writing apparatus and charged particle beam writing method using a generated frame that surrounds a first data processing block | Akihito Anpo | 2015-04-14 |
| 8878149 | Charged particle beam writing apparatus and charged particle beam writing method | — | 2014-11-04 |
| 8872141 | Charged particle beam writing apparatus and charged particle beam writing method | Yasuo Kato, Akihito Anpo | 2014-10-28 |
| 8796650 | Charged particle beam drawing method and apparatus | — | 2014-08-05 |
| 8669537 | Charged particle beam writing apparatus and method | — | 2014-03-11 |
| 8563952 | Charged particle beam writing apparatus | Akihito Anpo | 2013-10-22 |
| 8563953 | Charged particle beam writing apparatus and charged particle beam writing method | Noriaki Nakayamada, Makoto Hiramoto | 2013-10-22 |
| 8552405 | Charged particle beam writing apparatus and charged particle beam writing method | Yasuo Kato | 2013-10-08 |
| 8527913 | Method for resizing pattern to be written by lithography technique, and charged particle beam writing method | Junichi Suzuki, Takayuki Abe | 2013-09-03 |
| 8466440 | Charged particle beam drawing apparatus and control method thereof | Yasuo Kato, Akihito Anpo | 2013-06-18 |
| 8429575 | Method for resizing pattern to be written by lithography technique, and charged particle beam writing method | Junichi Suzuki, Takayuki Abe | 2013-04-23 |
| 8352889 | Beam dose computing method and writing method and record carrier body and writing apparatus | Keiko Emi, Junichi Suzuki, Takayuki Abe, Tomohiro Iijima | 2013-01-08 |
| 8309283 | Method and apparatus for writing | Yasuo Kato, Hiroshi Matsumoto, Tomoo Motosugi, Tomohiro Iijima, Takayuki Abe | 2012-11-13 |
| 8188449 | Charged particle beam drawing method and apparatus | Hayato Shibata, Hitoshi Higurashi, Akihito Anpo, Shigehiro Hara, Susumu Oogi | 2012-05-29 |
| 8183545 | Charged particle beam writing apparatus, charged particle beam writing method and apparatus of processing data for charged particle beam writing | — | 2012-05-22 |