Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8122390 | Charged particle beam writing apparatus, and apparatus and method for correcting dimension error of pattern | Takayuki Abe | 2012-02-21 |
| 8103980 | Beam dose computing method and writing method and record carrier body and writing apparatus | Keiko Emi, Junichi Suzuki, Takayuki Abe, Tomohiro Iljima | 2012-01-24 |
| 8065635 | Method for resizing pattern to be written by lithography technique, and charged particle beam writing method | Junichi Suzuki, Takayuki Abe | 2011-11-22 |
| 7740991 | Beam dose computing method and writing method and record carrier body and writing apparatus for determining an optimal dose of a charged particle beam | Keiko Emi, Junichi Suzuki, Takayuki Abe, Tomohiro Iijima | 2010-06-22 |
| 7601968 | Charged particle beam writing method and apparatus | Takayuki Abe | 2009-10-13 |