| 10020159 |
Multi charged particle beam writing method and multi charged particle beam writing apparatus |
Hiroshi Matsumoto, Munehiro Ogasawara, Hideo Inoue, Ryoichi Yoshikawa |
2018-07-10 |
| 9570267 |
Multi charged particle beam writing method and multi charged particle beam writing apparatus |
Hiroshi Matsumoto, Munehiro Ogasawara, Hideo Inoue, Ryoichi Yoshikawa |
2017-02-14 |
| 9202673 |
Multi charged particle beam writing method and multi charged particle beam writing apparatus |
Hiroshi Matsumoto, Munehiro Ogasawara, Hideo Inoue, Ryoichi Yoshikawa |
2015-12-01 |
| 8423921 |
Data verification method and charged particle beam writing apparatus |
Yujin Handa, Kei Hasegawa |
2013-04-16 |
| 8352889 |
Beam dose computing method and writing method and record carrier body and writing apparatus |
Keiko Emi, Junichi Suzuki, Takayuki Abe, Jun Yashima |
2013-01-08 |
| 8309283 |
Method and apparatus for writing |
Yasuo Kato, Jun Yashima, Hiroshi Matsumoto, Tomoo Motosugi, Takayuki Abe |
2012-11-13 |
| 7872745 |
Pattern inspection apparatus and pattern inspection method |
Takayuki Abe, Hideo Tsuchiya, Tetsuyuki Arai |
2011-01-18 |
| 7740991 |
Beam dose computing method and writing method and record carrier body and writing apparatus for determining an optimal dose of a charged particle beam |
Keiko Emi, Junichi Suzuki, Takayuki Abe, Jun Yashima |
2010-06-22 |
| 7657863 |
Pattern area value calculating method, proximity effect correcting method, and charged particle beam writing method and apparatus |
Masafumi Ise |
2010-02-02 |
| 7619230 |
Charged particle beam writing method and apparatus and readable storage medium |
Junichi Suzuki, Keiko Emi, Takayuki Abe, Hideyuki Tsurumaki |
2009-11-17 |
| 7608845 |
Charged particle beam writing apparatus and method thereof, and method for resizing dimension variation due to loading effect |
Takayuki Abe, Junichi Suzuki, Hideyuki Tsurumaki |
2009-10-27 |
| 7511290 |
Charged particle beam writing method and apparatus |
Junichi Suzuki, Keiko Emi, Takayuki Abe |
2009-03-31 |
| 7476881 |
Charged beam drawing apparatus and charged beam drawing method |
Kiyoshi Hattori, Kenji Ohtoshi, Yoshiaki Onimaru, Hayato Kimura, Tateki Watanabe |
2009-01-13 |
| 6346354 |
Pattern writing method |
Takayuki Abe, Hirohito Anze, Susumu Oogi, Mitsuko Shimizu, Hideo Inoue +5 more |
2002-02-12 |
| 6313476 |
Charged beam lithography system |
Mitsuko Shimizu, Takayuki Abe, Hirohito Anze, Susumu Oogi, Takashi Kamikubo +4 more |
2001-11-06 |