Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10020159 | Multi charged particle beam writing method and multi charged particle beam writing apparatus | Hiroshi Matsumoto, Munehiro Ogasawara, Hideo Inoue, Ryoichi Yoshikawa | 2018-07-10 |
| 9570267 | Multi charged particle beam writing method and multi charged particle beam writing apparatus | Hiroshi Matsumoto, Munehiro Ogasawara, Hideo Inoue, Ryoichi Yoshikawa | 2017-02-14 |
| 9202673 | Multi charged particle beam writing method and multi charged particle beam writing apparatus | Hiroshi Matsumoto, Munehiro Ogasawara, Hideo Inoue, Ryoichi Yoshikawa | 2015-12-01 |
| 8423921 | Data verification method and charged particle beam writing apparatus | Yujin Handa, Kei Hasegawa | 2013-04-16 |
| 8352889 | Beam dose computing method and writing method and record carrier body and writing apparatus | Keiko Emi, Junichi Suzuki, Takayuki Abe, Jun Yashima | 2013-01-08 |
| 8309283 | Method and apparatus for writing | Yasuo Kato, Jun Yashima, Hiroshi Matsumoto, Tomoo Motosugi, Takayuki Abe | 2012-11-13 |
| 7872745 | Pattern inspection apparatus and pattern inspection method | Takayuki Abe, Hideo Tsuchiya, Tetsuyuki Arai | 2011-01-18 |
| 7740991 | Beam dose computing method and writing method and record carrier body and writing apparatus for determining an optimal dose of a charged particle beam | Keiko Emi, Junichi Suzuki, Takayuki Abe, Jun Yashima | 2010-06-22 |
| 7657863 | Pattern area value calculating method, proximity effect correcting method, and charged particle beam writing method and apparatus | Masafumi Ise | 2010-02-02 |
| 7619230 | Charged particle beam writing method and apparatus and readable storage medium | Junichi Suzuki, Keiko Emi, Takayuki Abe, Hideyuki Tsurumaki | 2009-11-17 |
| 7608845 | Charged particle beam writing apparatus and method thereof, and method for resizing dimension variation due to loading effect | Takayuki Abe, Junichi Suzuki, Hideyuki Tsurumaki | 2009-10-27 |
| 7511290 | Charged particle beam writing method and apparatus | Junichi Suzuki, Keiko Emi, Takayuki Abe | 2009-03-31 |
| 7476881 | Charged beam drawing apparatus and charged beam drawing method | Kiyoshi Hattori, Kenji Ohtoshi, Yoshiaki Onimaru, Hayato Kimura, Tateki Watanabe | 2009-01-13 |
| 6346354 | Pattern writing method | Takayuki Abe, Hirohito Anze, Susumu Oogi, Mitsuko Shimizu, Hideo Inoue +5 more | 2002-02-12 |
| 6313476 | Charged beam lithography system | Mitsuko Shimizu, Takayuki Abe, Hirohito Anze, Susumu Oogi, Takashi Kamikubo +4 more | 2001-11-06 |