Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11244807 | Settling time determination method and multi charged particle beam writing method | — | 2022-02-08 |
| 10217606 | Charged particle beam drawing method and charged particle beam drawing apparatus | Rumi Ito | 2019-02-26 |
| 9852883 | Charged particle beam drawing apparatus and charged particle beam drawing method | — | 2017-12-26 |
| 9583310 | Charged particle beam writing apparatus, charged particle beam writing method, and shot correction method of charged particle beam writing method | — | 2017-02-28 |
| 9190245 | Charged particle beam writing apparatus, and charged particle beam writing method | Takayuki Ohnishi, Kaoru Tsuruta, Kenji Ohtoshi | 2015-11-17 |
| 9147552 | Charged particle beam writing method and charged particle beam writing apparatus | Hirohito Anze, Satoshi Nakahashi | 2015-09-29 |
| 8309283 | Method and apparatus for writing | Yasuo Kato, Jun Yashima, Hiroshi Matsumoto, Tomohiro Iijima, Takayuki Abe | 2012-11-13 |