Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11352694 | Drawing apparatus and control method thereof | Satoshi Nakahashi | 2022-06-07 |
| 9472372 | Charged particle beam writing apparatus and charged particle beam writing method | Taku Yamada, Yasuyuki Taneda, Kenji Ohtoshi | 2016-10-18 |
| 9190245 | Charged particle beam writing apparatus, and charged particle beam writing method | Tomoo Motosugi, Takayuki Ohnishi, Kenji Ohtoshi | 2015-11-17 |
| 8748843 | Charged particle beam drawing apparatus and charged particle beam drawing method | — | 2014-06-10 |
| 8183544 | Correcting substrate for charged particle beam lithography apparatus | Takashi Kamikubo, Rieko Nishimura, Shusuke Yoshitake, Shuichi Tamamushi | 2012-05-22 |