Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11475557 | Mask inspection apparatus, electron beam inspection apparatus, mask inspection method, and electron beam inspection method | — | 2022-10-18 |
| 10572990 | Pattern inspection apparatus, pattern position measurement apparatus, aerial image measurement system, method for measuring aerial image, pattern position repairing apparatus, method for repairing pattern position, aerial image data processing apparatus, method for processing aerial image data, pattern exposure apparatus, method for exposing pattern, method for manufacturing mask, and mask manufacturing system | Manabu Isobe, Thomas Scheruebl, Dirk Beyer, Sven Heisig | 2020-02-25 |
| 9552963 | Charged particle beam writing apparatus and method therefor | — | 2017-01-24 |
| 8718972 | Electron beam writing apparatus and position displacement amount correcting method | — | 2014-05-06 |
| 8399833 | Charged particle beam writing method, method for detecting position of reference mark for charged particle beam writing, and charged particle beam writing apparatus | — | 2013-03-19 |
| 8183544 | Correcting substrate for charged particle beam lithography apparatus | Kaoru Tsuruta, Takashi Kamikubo, Rieko Nishimura, Shuichi Tamamushi | 2012-05-22 |
| 7643130 | Position measuring apparatus and positional deviation measuring method | Shuichi Tamamushi | 2010-01-05 |
| 7554107 | Writing method and writing apparatus of charged particle beam, positional deviation measuring method, and position measuring apparatus | Shuichi Tamamushi | 2009-06-30 |
| 6676289 | Temperature measuring method in pattern drawing apparatus | Ryoichi Hirano, Toru Tojo, Shuichiro Fukutome, Teruaki Yamamoto, Masaki Toriumi | 2004-01-13 |
| 6281510 | Sample transferring method and sample transfer supporting apparatus | Yoshiaki Tsukumo, Ryoichi Hirano, Toru Tojo, Yoshiaki Tada, Makoto Kanda | 2001-08-28 |
| 6182369 | Pattern forming apparatus | Ryoichi Hirano, Kazuto Matsuki, Toru Tojo | 2001-02-06 |
| 6172364 | Charged particle beam irradiation apparatus | Munehiro Ogasawara, Jun Takamatsu, Naoharu Shimomura, Takayuki Abe, Masamitsu Itoh | 2001-01-09 |
| 6090176 | Sample transferring method and sample transfer supporting apparatus | Yoshiaki Tsukumo, Ryoichi Hirano, Toru Tojo, Yoshiaki Tada, Makoto Kanda | 2000-07-18 |
| 5929452 | Electrostatic deflecting electrode unit for use in charged beam lithography apparatus and method of manufacture the same | Hiroaki Hirazawa, Shigeru Wakayama | 1999-07-27 |
| 5912468 | Charged particle beam exposure system | Ryoichi Hirano, Souji Koikari, Kazuto Matsuki, Toru Tojo | 1999-06-15 |
| 5909030 | Pattern transfer apparatus, an operation management system thereof, and an operation management system for a semiconductor manufacture apparatus | Masamitsu Itoh, Tadahiro Takigawa | 1999-06-01 |
| 5850083 | Charged particle beam lithograph apparatus | Souji Koikari, Shuichi Tamamushi, Munehiro Ogasawara | 1998-12-15 |