Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6319642 | Electron beam exposure apparatus | Shigehiro Hara, Eiji Murakami, Hitoshi Higurashi, Toshio Yamaguchi, Kazuto Matsuki +2 more | 2001-11-20 |
| 5912468 | Charged particle beam exposure system | Ryoichi Hirano, Kazuto Matsuki, Shusuke Yoshitake, Toru Tojo | 1999-06-15 |
| 5894057 | Charged beam drawing method | Toshio Yamaguchi, Kazuto Matsuki, Shuichi Tamamushi, Eiji Murakami, Shigehiro Hara | 1999-04-13 |
| 5850083 | Charged particle beam lithograph apparatus | Shuichi Tamamushi, Shusuke Yoshitake, Munehiro Ogasawara | 1998-12-15 |