Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10685435 | Drawing data generating method | Kenichi Yasui, Noriaki Nakayamada | 2020-06-16 |
| 10503860 | Method of creating writing data | Kenichi Yasui, Yasuo Kato | 2019-12-10 |
| 10445450 | Generating method of drawing data and charged particle beam drawing method | Kenichi Yasui | 2019-10-15 |
| 10199199 | Drawing data creation method and charged particle beam drawing apparatus | Kenichi Yasui, Yasuo Kato | 2019-02-05 |
| 10096452 | Data processing method, charged particle beam writing method, and charged particle beam writing apparatus | Kenichi Yasui, Shinji Sakamoto | 2018-10-09 |
| 9984853 | Method for generating writing data | Kenichi Yasui, Yasuo Kato | 2018-05-29 |
| 9779913 | Charged particle beam drawing apparatus and drawing data generation method | Kenichi Yasui, Hiroshi Yamashita, Yasuo Kato, Saori Gomi, Shinji Sakamoto +4 more | 2017-10-03 |
| 9558315 | Method of generating write data, multi charged particle beam writing apparatus, and pattern inspection apparatus | Kenichi Yasui | 2017-01-31 |
| 9164044 | Charged particle beam lithography apparatus, inspection apparatus and inspection method of pattern writing data | Yasuo Kato, Akihito Anpo, Noriaki Nakayamada | 2015-10-20 |
| 8280632 | Apparatus and method for inspecting overlapping figure, and charged particle beam writing apparatus | Shinji Sakamoto, Hitoshi Higurashi | 2012-10-02 |
| 8255441 | Figure data verification apparatus and method therefor | Jun Kasahara, Shinji Sakamoto | 2012-08-28 |
| 8207514 | Charged particle beam drawing apparatus and proximity effect correction method thereof | Shuichi Tamamushi, Takashi Kamikubo, Hitoshi Higurashi, Shinji Sakamoto, Yusuke Sakai +2 more | 2012-06-26 |
| 8188449 | Charged particle beam drawing method and apparatus | Hayato Shibata, Hitoshi Higurashi, Akihito Anpo, Jun Yashima, Susumu Oogi | 2012-05-29 |
| 7949966 | Data verification method, charged particle beam writing apparatus, and computer-readable storage medium with program | Akihito Anpo, Jun Kasahara, Hitoshi Higurashi | 2011-05-24 |
| 7786453 | Charged-particle beam pattern writing method and apparatus with a pipeline process to transfer data | Shinji Sakamoto, Hitoshi Higurashi | 2010-08-31 |
| 7698682 | Writing error verification method of pattern writing apparatus and generation apparatus of writing error verification data for pattern writing apparatus | Akihito Anpo, Jun Kasahara, Hitoshi Higurashi | 2010-04-13 |
| 7592611 | Creation method and conversion method of charged particle beam writing data, and writing method of charged particle beam | Jun Kasahara, Hitoshi Higurashi, Akihito Anpo | 2009-09-22 |
| 7504645 | Method of forming pattern writing data by using charged particle beam | Akihito Anpo, Hitoshi Higurashi | 2009-03-17 |
| 6806941 | Pattern forming method and pattern forming apparatus | Soichi Inoue, Iwao Higashikawa, Yoji Ogawa, Kazuko Yamamoto | 2004-10-19 |
| 6566662 | Charged beam exposure system | Eiji Murakami, Hitoshi Higurashi | 2003-05-20 |
| 6335145 | Pattern forming method and pattern forming apparatus | Soichi Inoue, Iwao Higashikawa, Yoji Ogawa, Kazuko Yamamoto | 2002-01-01 |
| 6319642 | Electron beam exposure apparatus | Eiji Murakami, Hitoshi Higurashi, Toshio Yamaguchi, Kazuto Matsuki, Souji Koikari +2 more | 2001-11-20 |
| 6165652 | Pattern forming method and pattern forming apparatus | Soichi Inoue, Iwao Higashikawa, Yoji Ogawa, Kazuko Yamamoto | 2000-12-26 |
| 6047116 | Method for generating exposure data for lithographic apparatus | Eiji Murakami, Hitoshi Higurashi, Kiyomi Koyama, Takayuki Abe | 2000-04-04 |
| 6040114 | Pattern forming method | Soichi Inoue, Iwao Higashikawa, Yoji Ogawa, Kazuko Yamamoto | 2000-03-21 |