Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9779913 | Charged particle beam drawing apparatus and drawing data generation method | Shigehiro Hara, Kenichi Yasui, Hiroshi Yamashita, Yasuo Kato, Shinji Sakamoto +4 more | 2017-10-03 |
| 9734981 | Charged particle beam writing apparatus and charged particle beam writing method | Hitoshi Higurashi | 2017-08-15 |
| 9117632 | Charged particle beam writing apparatus and charged particle beam writing method | Yusuke Sakai | 2015-08-25 |