Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10971331 | Writing data generation method, computer-readable recording medium on which program is recorded, and multi-charged particle beam writing apparatus | Kenichi Yasui, Chiaki Inaba, Hikaru Yamamura, Satoru Fukushima, Yoshinori Akahane | 2021-04-06 |
| 10096452 | Data processing method, charged particle beam writing method, and charged particle beam writing apparatus | Kenichi Yasui, Shigehiro Hara | 2018-10-09 |
| 9779913 | Charged particle beam drawing apparatus and drawing data generation method | Shigehiro Hara, Kenichi Yasui, Hiroshi Yamashita, Yasuo Kato, Saori Gomi +4 more | 2017-10-03 |
| 8339594 | Method for measuring semiconductor wafer profile and device for measuring the same used therefor | — | 2012-12-25 |
| 8280632 | Apparatus and method for inspecting overlapping figure, and charged particle beam writing apparatus | Shigehiro Hara, Hitoshi Higurashi | 2012-10-02 |
| 8255441 | Figure data verification apparatus and method therefor | Jun Kasahara, Shigehiro Hara | 2012-08-28 |
| 8207514 | Charged particle beam drawing apparatus and proximity effect correction method thereof | Shigehiro Hara, Shuichi Tamamushi, Takashi Kamikubo, Hitoshi Higurashi, Yusuke Sakai +2 more | 2012-06-26 |
| 7786453 | Charged-particle beam pattern writing method and apparatus with a pipeline process to transfer data | Shigehiro Hara, Hitoshi Higurashi | 2010-08-31 |
| 7767312 | Layered product | — | 2010-08-03 |
| 7755743 | Spatial information detecting apparatus | Minoru Kumahara, Yusuke Hashimoto, Yuji Takada | 2010-07-13 |
| 7579186 | Human monoclonal antibody against TGF-β type II receptor and medicinal use thereof | Masafumi Kamada | 2009-08-25 |
| 7541438 | Monoclonal antibody against connective tissue growth factor and medicinal uses thereof | Takuya Tamatani, Katsunari Tezuka, Masaharu Takigawa | 2009-06-02 |
| 7371086 | Anti-unplugging unit and transmission cord | Akifumi Yamada, Keiji Kawauchi, Kazunao Narita | 2008-05-13 |
| 6562618 | Monoclonal antibody against connective tissue growth factor and medicinal uses thereof | Takuya Tamatani, Katsunari Tezuka, Masaharu Takigawa | 2003-05-13 |
| 5949072 | Pyroelectric infrared ray sensor | Yuji Takada, Teruki Hatatani, Toshio Fujimura | 1999-09-07 |
| 5917187 | Pyroelectric infrared ray sensor | Yuji Takada, Toshio Fujimura, Teruki Hatatani | 1999-06-29 |
| 5895626 | Sterilizing method, apparatus and container of solid matter or liquid matter containing solid matter | Takaji Nakata, Tsutomu Yamamoto, Megumi Imamura, Ryuichi Tsutsumi, Tetsuo Asahara | 1999-04-20 |
| 4993962 | Closed type connecting block | Minoru Noda, Junji Nomura | 1991-02-19 |