Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11556114 | Drawing apparatus and drawing method | — | 2023-01-17 |
| 10971331 | Writing data generation method, computer-readable recording medium on which program is recorded, and multi-charged particle beam writing apparatus | Shinji Sakamoto, Kenichi Yasui, Chiaki Inaba, Satoru Fukushima, Yoshinori Akahane | 2021-04-06 |
| 9460892 | Charged particle beam writing method, computer-readable recording medium, and charged particle beam writing apparatus | Sumito Nakada, Osamu Iizuka, Hideyuki Tsurumaki | 2016-10-04 |
| 9236154 | Charged-particle beam drawing method, computer-readable recording media, and charged-particle beam drawing apparatus | Sumito Nakada, Osamu Iizuka | 2016-01-12 |