Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9589766 | Apparatus and method for calculating drawing speeds of a charged particle beam | — | 2017-03-07 |
| 9460892 | Charged particle beam writing method, computer-readable recording medium, and charged particle beam writing apparatus | Sumito Nakada, Hikaru Yamamura, Osamu Iizuka | 2016-10-04 |
| 7619230 | Charged particle beam writing method and apparatus and readable storage medium | Junichi Suzuki, Keiko Emi, Takayuki Abe, Tomohiro Iijima | 2009-11-17 |
| 7608845 | Charged particle beam writing apparatus and method thereof, and method for resizing dimension variation due to loading effect | Takayuki Abe, Junichi Suzuki, Tomohiro Iijima | 2009-10-27 |
| 5822450 | Method for monitoring equipment state by distribution measurement data, and equipment monitoring apparatus | Akio Arakawa, Yoshiaki Hattori, Shigeru Kanemoto, Ichiro Tai, Riyoko Haneda | 1998-10-13 |