Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153130 | Charged particle beam drawing apparatus and charged particle beam drawing method | — | 2018-12-11 |
| 9460892 | Charged particle beam writing method, computer-readable recording medium, and charged particle beam writing apparatus | Hikaru Yamamura, Osamu Iizuka, Hideyuki Tsurumaki | 2016-10-04 |
| 9236154 | Charged-particle beam drawing method, computer-readable recording media, and charged-particle beam drawing apparatus | Osamu Iizuka, Hikaru Yamamura | 2016-01-12 |