Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11127566 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | — | 2021-09-21 |
| 11037759 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Ryoichi Kakehi | 2021-06-15 |
| 11024485 | Multi-charged-particle-beam writing apparatus and beam evaluating method for the same | Eita FUJISAKI | 2021-06-01 |
| 10867774 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | — | 2020-12-15 |
| 10636616 | Aperture array alignment method and multi charged particle beam writing apparatus | — | 2020-04-28 |
| 10504696 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Yukitaka Shimizu | 2019-12-10 |
| 10497539 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Yukitaka Shimizu | 2019-12-03 |
| 10483088 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Yukitaka Shimizu | 2019-11-19 |
| 10458477 | Seal for rolling bearing and rolling bearing | — | 2019-10-29 |
| 10388488 | Multi charged particle beam drawing apparatus and multi charged particle beam drawing method | Hirofumi Morita, Tsubasa NANAO | 2019-08-20 |
| 10109458 | Multi charged-particle beam writing apparatus and adjustment method for the same | — | 2018-10-23 |
| 9966228 | Multi charged particle beam apparatus, and shape adjustment method of multi charged particle beam image | — | 2018-05-08 |
| 9653262 | Method of measuring beam position of multi charged particle beam, and multi charged particle beam writing apparatus | Kenji Ohtoshi | 2017-05-16 |
| 9536705 | Method for correcting drift of charged particle beam, and charged particle beam writing apparatus | — | 2017-01-03 |
| 9466461 | Rotation angle measuring method of multi-charged particle beam image, rotation angle adjustment method of multi-charged particle beam image, and multi-charged particle beam writing apparatus | Kenji Ohtoshi | 2016-10-11 |
| 9460892 | Charged particle beam writing method, computer-readable recording medium, and charged particle beam writing apparatus | Sumito Nakada, Hikaru Yamamura, Hideyuki Tsurumaki | 2016-10-04 |
| 9236154 | Charged-particle beam drawing method, computer-readable recording media, and charged-particle beam drawing apparatus | Sumito Nakada, Hikaru Yamamura | 2016-01-12 |
| 8362450 | Electron beam drift correction method and electron beam writing method | Kiyoshi Hattori | 2013-01-29 |
| 8253112 | Lithography apparatus and focusing method for charged particle beam | Kenji Ohtoshi | 2012-08-28 |
| 8188443 | Focusing method of charged particle beam and astigmatism adjusting method of charged particle | Kenji Ohtoshi, Hitoshi Sunaoshi, Takahito Nakayama | 2012-05-29 |
| 8008631 | Method of acquiring offset deflection amount for shaped beam and lithography apparatus | Takahito Nakayama, Kenji Ohtoshi, Shunji Shinkawa | 2011-08-30 |