Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11749491 | Electron beam writing apparatus and cathode life span prediction method | Satoshi Nakahashi, Nobuo Miyamoto, Takahito Nakayama | 2023-09-05 |
| 8507873 | Drift measuring method, charged particle beam writing method, and charged particle beam writing apparatus | Kouji Fukushima | 2013-08-13 |
| 8008631 | Method of acquiring offset deflection amount for shaped beam and lithography apparatus | Takahito Nakayama, Kenji Ohtoshi, Osamu Iizuka | 2011-08-30 |