Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11749491 | Electron beam writing apparatus and cathode life span prediction method | Nobuo Miyamoto, Takahito Nakayama, Shunji Shinkawa | 2023-09-05 |
| 11352694 | Drawing apparatus and control method thereof | Kaoru Tsuruta | 2022-06-07 |
| 9147552 | Charged particle beam writing method and charged particle beam writing apparatus | Tomoo Motosugi, Hirohito Anze | 2015-09-29 |
| 8748064 | Charged particle beam drawing method and charged particle beam drawing apparatus | Rieko Nishimura | 2014-06-10 |