Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11658002 | Charged particle beam adjustment method, charged particle beam drawing method, and charged particle beam irradiation apparatus | Takahito Nakayama | 2023-05-23 |
| 11037759 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Osamu Iizuka | 2021-06-15 |
| 8076649 | Charged particle beam writing apparatus and optical axis deviation correcting method for charged particle beam | Michihiro Sakai, Kiyoshi Hattori | 2011-12-13 |