Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8872139 | Settling time acquisition method | Rieko Nishimura | 2014-10-28 |
| 8076649 | Charged particle beam writing apparatus and optical axis deviation correcting method for charged particle beam | Ryoichi Kakehi, Kiyoshi Hattori | 2011-12-13 |