Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11024485 | Multi-charged-particle-beam writing apparatus and beam evaluating method for the same | Osamu Iizuka | 2021-06-01 |
| 10541105 | Multi charged particle beam writing apparatus and adjusting method for multi charged particle beam writing apparatus | Yukitaka Shimizu | 2020-01-21 |