Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11804360 | Multi charged particle beam adjustment method, multi charged particle beam irradiation method, and multi charged particle beam irradiation apparatus | Hirofumi Morita, Takanao Touya | 2023-10-31 |
| 11740546 | Multi charged particle beam writing apparatus and method of adjusting same | Hiroshi Matsumoto | 2023-08-29 |
| 10490388 | Multibeam-focus adjusting method, multibeam-focus measuring method, and charged-particle-beam lithography apparatus | — | 2019-11-26 |
| 10388488 | Multi charged particle beam drawing apparatus and multi charged particle beam drawing method | Hirofumi Morita, Osamu Iizuka | 2019-08-20 |
| 10157723 | Multi charged particle beam writing apparatus and method of adjusting the same | Yukitaka Shimizu | 2018-12-18 |
| 10042261 | Method of aperture alignment and multi charged particle beam writing apparatus | — | 2018-08-07 |