| 8352889 |
Beam dose computing method and writing method and record carrier body and writing apparatus |
Junichi Suzuki, Takayuki Abe, Tomohiro Iijima, Jun Yashima |
2013-01-08 |
| 8103980 |
Beam dose computing method and writing method and record carrier body and writing apparatus |
Junichi Suzuki, Takayuki Abe, Tomohiro Iljima, Jun Yashima |
2012-01-24 |
| 7740991 |
Beam dose computing method and writing method and record carrier body and writing apparatus for determining an optimal dose of a charged particle beam |
Junichi Suzuki, Takayuki Abe, Tomohiro Iijima, Jun Yashima |
2010-06-22 |
| 7669174 |
Pattern generation method and charged particle beam writing apparatus |
Junichi Suzuki, Takayuki Abe |
2010-02-23 |
| 7619230 |
Charged particle beam writing method and apparatus and readable storage medium |
Junichi Suzuki, Takayuki Abe, Tomohiro Iijima, Hideyuki Tsurumaki |
2009-11-17 |
| 7525110 |
Multiple irradiation effect-corrected dose determination technique for charged particle beam lithography |
Junichi Suzuki, Takayuki Abe |
2009-04-28 |
| 7511290 |
Charged particle beam writing method and apparatus |
Junichi Suzuki, Takayuki Abe, Tomohiro Iijima |
2009-03-31 |