| 11942305 |
Data generation method, charged particle beam irradiation device, and computer-readable recording medium |
— |
2024-03-26 |
| 11789372 |
Writing data generating method and multi charged particle beam writing apparatus |
Noriaki Nakayamada |
2023-10-17 |
| 11774860 |
Writing data generating method, multi charged particle beam writing apparatus, pattern inspecting apparatus, and computer-readable recording medium |
Noriaki Nakayamada |
2023-10-03 |
| 11749499 |
Data generation method and charged particle beam irradiation device |
— |
2023-09-05 |
| 11456153 |
Charged particle beam writing method and charged particle beam writing apparatus |
— |
2022-09-27 |
| 11443918 |
Charged particle beam writing method and charged particle beam writing apparatus |
Yasuo Kato |
2022-09-13 |
| 11327408 |
Writing data generating method and multi charged particle beam writing apparatus |
Noriaki Nakayamada |
2022-05-10 |
| 11199781 |
Writing data generating method, multi charged particle beam writing apparatus, pattern inspecting apparatus, and computer-readable recording medium |
Noriaki Nakayamada |
2021-12-14 |
| 10971331 |
Writing data generation method, computer-readable recording medium on which program is recorded, and multi-charged particle beam writing apparatus |
Shinji Sakamoto, Chiaki Inaba, Hikaru Yamamura, Satoru Fukushima, Yoshinori Akahane |
2021-04-06 |
| 10714312 |
Data processing method, charged particle beam writing apparatus, and charged particle beam writing system |
— |
2020-07-14 |
| 10685435 |
Drawing data generating method |
Shigehiro Hara, Noriaki Nakayamada |
2020-06-16 |
| 10503860 |
Method of creating writing data |
Shigehiro Hara, Yasuo Kato |
2019-12-10 |
| 10445450 |
Generating method of drawing data and charged particle beam drawing method |
Shigehiro Hara |
2019-10-15 |
| 10199199 |
Drawing data creation method and charged particle beam drawing apparatus |
Shigehiro Hara, Yasuo Kato |
2019-02-05 |
| 10096452 |
Data processing method, charged particle beam writing method, and charged particle beam writing apparatus |
Shigehiro Hara, Shinji Sakamoto |
2018-10-09 |
| 9984853 |
Method for generating writing data |
Shigehiro Hara, Yasuo Kato |
2018-05-29 |
| 9846760 |
Writing data verification method and multi-charged particle beam writing apparatus |
— |
2017-12-19 |
| 9779913 |
Charged particle beam drawing apparatus and drawing data generation method |
Shigehiro Hara, Hiroshi Yamashita, Yasuo Kato, Saori Gomi, Shinji Sakamoto +4 more |
2017-10-03 |
| 9715994 |
Charged particle beam drawing apparatus, format check apparatus and format check method |
— |
2017-07-25 |
| 9659745 |
Charged particle beam drawing apparatus, information processing apparatus and pattern inspection apparatus |
— |
2017-05-23 |
| 9558315 |
Method of generating write data, multi charged particle beam writing apparatus, and pattern inspection apparatus |
Shigehiro Hara |
2017-01-31 |
| 7357210 |
Vehicle power transmission system |
Akihiro Ima, Toshiyuki Hasegawa, Kazuhiko Ohtsuki |
2008-04-15 |