Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8255441 | Figure data verification apparatus and method therefor | Shigehiro Hara, Shinji Sakamoto | 2012-08-28 |
| 7949966 | Data verification method, charged particle beam writing apparatus, and computer-readable storage medium with program | Akihito Anpo, Hitoshi Higurashi, Shigehiro Hara | 2011-05-24 |
| 7698682 | Writing error verification method of pattern writing apparatus and generation apparatus of writing error verification data for pattern writing apparatus | Akihito Anpo, Hitoshi Higurashi, Shigehiro Hara | 2010-04-13 |
| 7592611 | Creation method and conversion method of charged particle beam writing data, and writing method of charged particle beam | Shigehiro Hara, Hitoshi Higurashi, Akihito Anpo | 2009-09-22 |