Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE47707 | Charged particle beam writing apparatus and charged particle beam writing method | Yasuo Kato, Jun Yashima | 2019-11-05 |
| 9164044 | Charged particle beam lithography apparatus, inspection apparatus and inspection method of pattern writing data | Shigehiro Hara, Yasuo Kato, Noriaki Nakayamada | 2015-10-20 |
| 9141750 | Charged particle beam writing apparatus and irradiation time apportionment method of charged particle beams for multiple writing | Jun Yashima, Yasuo Kato | 2015-09-22 |
| 9006691 | Charged particle beam writing apparatus and charged particle beam writing method using a generated frame that surrounds a first data processing block | Jun Yashima | 2015-04-14 |
| 8872141 | Charged particle beam writing apparatus and charged particle beam writing method | Yasuo Kato, Jun Yashima | 2014-10-28 |
| 8755924 | Charged particle beam writing method and apparatus therefor | — | 2014-06-17 |
| 8563952 | Charged particle beam writing apparatus | Jun Yashima | 2013-10-22 |
| 8502175 | Charged particle beam pattern forming apparatus and charged particle beam pattern forming method | Noriaki Nakayamada, Seiji Wake, Hideo Inoue | 2013-08-06 |
| 8471225 | Charged particle beam writing method and apparatus therefor | — | 2013-06-25 |
| 8466440 | Charged particle beam drawing apparatus and control method thereof | Jun Yashima, Yasuo Kato | 2013-06-18 |
| 8307314 | Write error verification method of writing apparatus and creation apparatus of write error verification data for writing apparatus | — | 2012-11-06 |
| 8207514 | Charged particle beam drawing apparatus and proximity effect correction method thereof | Shigehiro Hara, Shuichi Tamamushi, Takashi Kamikubo, Hitoshi Higurashi, Shinji Sakamoto +2 more | 2012-06-26 |
| 8188449 | Charged particle beam drawing method and apparatus | Hayato Shibata, Hitoshi Higurashi, Jun Yashima, Shigehiro Hara, Susumu Oogi | 2012-05-29 |
| 7949966 | Data verification method, charged particle beam writing apparatus, and computer-readable storage medium with program | Jun Kasahara, Hitoshi Higurashi, Shigehiro Hara | 2011-05-24 |
| 7750324 | Charged particle beam lithography apparatus and charged particle beam lithography method | Susumu Oogi, Hitoshi Higurashi, Toshiro Yamamoto | 2010-07-06 |
| 7698682 | Writing error verification method of pattern writing apparatus and generation apparatus of writing error verification data for pattern writing apparatus | Jun Kasahara, Hitoshi Higurashi, Shigehiro Hara | 2010-04-13 |
| 7592611 | Creation method and conversion method of charged particle beam writing data, and writing method of charged particle beam | Jun Kasahara, Shigehiro Hara, Hitoshi Higurashi | 2009-09-22 |
| 7504645 | Method of forming pattern writing data by using charged particle beam | Hitoshi Higurashi, Shigehiro Hara | 2009-03-17 |