Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8188449 | Charged particle beam drawing method and apparatus | Hayato Shibata, Hitoshi Higurashi, Akihito Anpo, Jun Yashima, Shigehiro Hara | 2012-05-29 |
| 7750324 | Charged particle beam lithography apparatus and charged particle beam lithography method | Hitoshi Higurashi, Akihito Anpo, Toshiro Yamamoto | 2010-07-06 |
| 6346354 | Pattern writing method | Takayuki Abe, Hirohito Anze, Mitsuko Shimizu, Hideo Inoue, Takashi Saito +5 more | 2002-02-12 |
| 6313476 | Charged beam lithography system | Mitsuko Shimizu, Takayuki Abe, Hirohito Anze, Takashi Kamikubo, Eiji Murakami +4 more | 2001-11-06 |
| 5863682 | Charged particle beam writing method for determining optimal exposure dose prior to pattern drawing | Takayuki Abe, Takashi Kamikubo, Hirohito Anze | 1999-01-26 |