Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10782621 | Imprint method, imprint apparatus, and template | Takashi Sato, Akiko Mimotogi, Akiko Yamada, Takeshi Suto | 2020-09-22 |
| 9971342 | Pattern data creating method, template, and semiconductor device manufacturing method | Sachiko Kobayashi | 2018-05-15 |
| 6346354 | Pattern writing method | Takayuki Abe, Hirohito Anze, Susumu Oogi, Hideo Inoue, Takashi Saito +5 more | 2002-02-12 |
| 6313476 | Charged beam lithography system | Takayuki Abe, Hirohito Anze, Susumu Oogi, Takashi Kamikubo, Eiji Murakami +4 more | 2001-11-06 |