Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5894057 | Charged beam drawing method | Toshio Yamaguchi, Kazuto Matsuki, Shuichi Tamamushi, Souji Koikari, Eiji Murakami | 1999-04-13 |
| 5538815 | Method for designing phase-shifting masks with automatization capability | Kazuko Oi, Kiyomi Koyama, Koji Hashimoto, Shinichi Ito, Katsuya Okumura | 1996-07-23 |