Issued Patents All Time
Showing 1–25 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12373939 | Defect inspection method | — | 2025-07-29 |
| 11995817 | Defect inspection method | — | 2024-05-28 |
| 11004193 | Inspection method and inspection apparatus | Hideo Tsuchiya, Masataka Shiratsuchi, Hideaki Hashimoto, Riki Ogawa | 2021-05-11 |
| 10997713 | Inspection device, inspection method, and storage medium | Takeshi Morino, Hideaki Okano, Yoshinori Honguh, Masataka Shiratsuchi, Hideaki Hashimoto | 2021-05-04 |
| 10984525 | Pattern inspection method and pattern inspection apparatus | Hideo Tsuchiya, Masataka Shiratsuchi, Hideaki Hashimoto, Riki Ogawa | 2021-04-20 |
| 10984978 | Multiple electron beam inspection apparatus and multiple electron beam inspection method | Hiromu Inoue, Masataka Shiratsuchi, Riki Ogawa | 2021-04-20 |
| 10846846 | Pattern inspection apparatus and pattern inspection method | Masataka Shiratsuchi, Riki Ogawa, Hideaki Hashimoto, Kazuhiro Nakashima, Hideo Tsuchiya +1 more | 2020-11-24 |
| 10775326 | Electron beam inspection apparatus and electron beam inspection method | Hideo Tsuchiya, Masataka Shiratsuchi, Hideaki Hashimoto, Riki Ogawa | 2020-09-15 |
| 10712295 | Electron beam inspection apparatus and electron beam inspection method | Hideo Tsuchiya, Masataka Shiratsuchi, Hideaki Hashimoto, Riki Ogawa | 2020-07-14 |
| 8442320 | Pattern inspection apparatus and pattern inspection method | Ikunao Isomura, Nobutaka Kikuiri | 2013-05-14 |
| 8254663 | Ultrafine lithography pattern inspection using multi-stage TDI image sensors with false image removability | Akira Kataoka, Ikunao Isomura, Nobutaka Kikuiri, Susumu Iida | 2012-08-28 |
| 8049897 | Reticle defect inspection apparatus and inspection method using thereof | Riki Ogawa | 2011-11-01 |
| 7894051 | Reticle defect inspection apparatus and reticle defect inspection method | Riki Ogawa | 2011-02-22 |
| 7036980 | Apparatus and method for forming pattern | Satoshi Imura, Noriaki Nakayamada | 2006-05-02 |
| 6676289 | Temperature measuring method in pattern drawing apparatus | Shusuke Yoshitake, Toru Tojo, Shuichiro Fukutome, Teruaki Yamamoto, Masaki Toriumi | 2004-01-13 |
| 6411023 | Vacuum processing apparatus and ion pump capable of suppressing leakage of ions and electrons from ion pump | Katsuhito Ogura, Toru Tojo | 2002-06-25 |
| 6281510 | Sample transferring method and sample transfer supporting apparatus | Shusuke Yoshitake, Yoshiaki Tsukumo, Toru Tojo, Yoshiaki Tada, Makoto Kanda | 2001-08-28 |
| 6239443 | Apparatus for emitting a beam to a sample used for manufacturing a semiconducor device | Toru Tojo, Susumu Saito, Hitoshi Suzuki, Kazuo Abe, Shinya Watanabe | 2001-05-29 |
| 6182369 | Pattern forming apparatus | Shusuke Yoshitake, Kazuto Matsuki, Toru Tojo | 2001-02-06 |
| 6090176 | Sample transferring method and sample transfer supporting apparatus | Shusuke Yoshitake, Yoshiaki Tsukumo, Toru Tojo, Yoshiaki Tada, Makoto Kanda | 2000-07-18 |
| 6080990 | Position measuring apparatus | Shinya Watanabe, Hitoshi Suzuki, Kazuo Abe, Susumu Saito, Toru Tojo | 2000-06-27 |
| 5912468 | Charged particle beam exposure system | Souji Koikari, Kazuto Matsuki, Shusuke Yoshitake, Toru Tojo | 1999-06-15 |
| 5642373 | Monolithic semiconductor laser array of radially disposed lasers | Takeshi Kamizato | 1997-06-24 |
| 5519720 | Semiconductor light emitting device | Etsuji Omura, Akira Takemoto, Kimio Shigihara | 1996-05-21 |
| 5442445 | Registration method and apparatus therefor | Kyoichi Tatsuno, Toshiya Umeda | 1995-08-15 |