Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9431208 | Charged-particle beam drawing apparatus and vibration damping mechanism | — | 2016-08-30 |
| 8277603 | Move mechanism for moving target object and charged particle beam writing apparatus | Shuichi Tamamushi | 2012-10-02 |
| 7589335 | Charged-particle beam pattern writing method and apparatus and software program for use therein | Takuya Matsukawa, Tomoyuki Horiuchi, Hayato Kimura, Tateki Watanabe, Kiyoshi Hattori | 2009-09-15 |
| 6676289 | Temperature measuring method in pattern drawing apparatus | Ryoichi Hirano, Shusuke Yoshitake, Toru Tojo, Teruaki Yamamoto, Masaki Toriumi | 2004-01-13 |