Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7900185 | Pattern writing circuit self-diagnosis method for charged beam photolithography apparatus and charged beam photolithography apparatus | Hayato Kimura, Yujin Handa, Seiji Wake, Seiichi Tsuchiya | 2011-03-01 |
| 7598504 | Writing error diagnosis method for charged particle beam photolithography apparatus and charged particle beam photolithography apparatus | Hayato Kimura, Yujin Handa, Seiji Wake, Seiichi Tsuchiya | 2009-10-06 |
| 7589335 | Charged-particle beam pattern writing method and apparatus and software program for use therein | Shuichiro Fukutome, Tomoyuki Horiuchi, Hayato Kimura, Tateki Watanabe, Kiyoshi Hattori | 2009-09-15 |