Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10969400 | Semiconductor device, angle value correction circuit and method therefor | Yoshitaka Shibuya | 2021-04-06 |
| 10886103 | Data processing method, data processing apparatus, and multiple charged-particle beam writing apparatus | Kei Hasegawa, Yoshiaki Onimaru | 2021-01-05 |
| 10483087 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Kei Hasegawa, Ryoh KAWANA | 2019-11-19 |
| 10475621 | Drawing device and drawing method | Kei Hasegawa, Hideo Inoue, Yoshiaki Onimaru | 2019-11-12 |
| 10109454 | Diagnosis method, charged particle beam lithography apparatus, and recording medium | Kei Hasegawa | 2018-10-23 |
| 9953800 | Multi-charged particle beam writing apparatus and multi-charged particle beam writing method | Kei Hasegawa, Hideo Inoue, Yoshiaki Onimaru | 2018-04-24 |
| 9934935 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Ryoichi Yoshikawa, Hideo Inoue, Yasuo Kato, Jun Yashima | 2018-04-03 |
| 8892971 | Output control scan flip-flop, semiconductor integrated circuit including the same, and design method for semiconductor integrated circuit | — | 2014-11-18 |
| 7900185 | Pattern writing circuit self-diagnosis method for charged beam photolithography apparatus and charged beam photolithography apparatus | Yujin Handa, Seiji Wake, Takuya Matsukawa, Seiichi Tsuchiya | 2011-03-01 |
| 7598504 | Writing error diagnosis method for charged particle beam photolithography apparatus and charged particle beam photolithography apparatus | Yujin Handa, Seiji Wake, Takuya Matsukawa, Seiichi Tsuchiya | 2009-10-06 |
| 7589335 | Charged-particle beam pattern writing method and apparatus and software program for use therein | Takuya Matsukawa, Shuichiro Fukutome, Tomoyuki Horiuchi, Tateki Watanabe, Kiyoshi Hattori | 2009-09-15 |
| 7476881 | Charged beam drawing apparatus and charged beam drawing method | Kiyoshi Hattori, Kenji Ohtoshi, Tomohiro Iijima, Yoshiaki Onimaru, Tateki Watanabe | 2009-01-13 |
| 7057157 | Photosensor device and disk inspection apparatus using it | Toshimi Nagaishi, Haruhiko Tsuchiya | 2006-06-06 |