Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8423921 | Data verification method and charged particle beam writing apparatus | Kei Hasegawa, Tomohiro Iijima | 2013-04-16 |
| 7900185 | Pattern writing circuit self-diagnosis method for charged beam photolithography apparatus and charged beam photolithography apparatus | Hayato Kimura, Seiji Wake, Takuya Matsukawa, Seiichi Tsuchiya | 2011-03-01 |
| 7598504 | Writing error diagnosis method for charged particle beam photolithography apparatus and charged particle beam photolithography apparatus | Hayato Kimura, Seiji Wake, Takuya Matsukawa, Seiichi Tsuchiya | 2009-10-06 |