Issued Patents All Time
Showing 1–25 of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10777384 | Multiple beam image acquisition apparatus and multiple beam image acquisition method | Atsushi Ando | 2020-09-15 |
| 10629406 | Optical system adjustment method of image acquisition apparatus | Munehiro Ogasawara, Atsushi Ando | 2020-04-21 |
| 10572995 | Inspection method and inspection apparatus | Hiromu Inoue | 2020-02-25 |
| 10504219 | Inspection apparatus and inspection method | Hideo Tsuchiya | 2019-12-10 |
| 10281415 | Pattern inspection method and pattern inspection apparatus | Takafumi Inoue | 2019-05-07 |
| 10127648 | Pattern inspection apparatus and pattern inspection method | Hideki Nukada | 2018-11-13 |
| 10094791 | Pattern inspection apparatus | — | 2018-10-09 |
| 10026011 | Mask inspection apparatus, mask evaluation method and mask evaluation system | Hideo Tsuchiya, Ikunao Isomura | 2018-07-17 |
| 9922415 | Inspection method, inspection apparatus, and inspection system | Takafumi Inoue, Hiroteru Akiyama | 2018-03-20 |
| 9869650 | Pattern inspection apparatus | — | 2018-01-16 |
| 9811896 | Measuring apparatus | Ikunao Isomura | 2017-11-07 |
| 9728373 | Pattern inspection apparatus and pattern inspection method | Ikunao Isomura | 2017-08-08 |
| 9691143 | Inspection apparatus and inspection apparatus system | Hiromu Inoue | 2017-06-27 |
| 9659361 | Measuring apparatus that generates positional deviation distribution of a pattern on a target object | Ikunao Isomura | 2017-05-23 |
| 9626755 | Mask inspection apparatus and mask inspection method | Hideo Tsuchiya, Ikunao Isomura | 2017-04-18 |
| 9575010 | Inspection apparatus and inspection method | Riki Ogawa, Hideaki Hashimoto | 2017-02-21 |
| 9542586 | Pattern inspection apparatus and pattern inspection method | Eiji Matsumoto, Hideo Tsuchiya | 2017-01-10 |
| 9530202 | Inspection apparatus and inspection method | — | 2016-12-27 |
| 9235883 | Inspection system and method | Takafumi Inoue, Ikunao Isomura | 2016-01-12 |
| 9196033 | Inspection sensitivity evaluation method | Hideaki Hashimoto | 2015-11-24 |
| 9165355 | Inspection method | Hideo Tsuchiya, Manabu Isobe, Hiroteru Akiyama, Makoto Yabe, Takafumi Inoue | 2015-10-20 |
| 9140654 | Inspection apparatus | Makoto Taya | 2015-09-22 |
| 9116136 | Inspection method and system | Hiromu Inoue | 2015-08-25 |
| 9086388 | Pattern evaluation method and apparatus | Riki Ogawa | 2015-07-21 |
| 9057711 | Inspection apparatus and method | Hideo Tsuchiya, Takafumi Inoue | 2015-06-16 |