Issued Patents All Time
Showing 26–43 of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8861832 | Inspection system and method | Takafumi Inoue, Eiji Matsumoto, Ikunao Isomura | 2014-10-14 |
| 8442320 | Pattern inspection apparatus and pattern inspection method | Ikunao Isomura, Ryoichi Hirano | 2013-05-14 |
| 8254663 | Ultrafine lithography pattern inspection using multi-stage TDI image sensors with false image removability | Akira Kataoka, Ikunao Isomura, Ryoichi Hirano, Susumu Iida | 2012-08-28 |
| 7678481 | Fuel cell system with a fuel tank configured to store a fuel at a pressure higher than atmospheric pressure | Yuusuke Sato | 2010-03-16 |
| 7597982 | Fuel cell system with a gas supply pump that applies negative pressure to the anode and cathode | Eiichi Sakaue, Yuusuke Sato, Atsushi Sadamoto | 2009-10-06 |
| 7446813 | Active camera apparatus and robot apparatus | Hideichi Nakamoto, Junko Hirokawa, Takashi Ichikawa, Hideki Ito, Hideki Ogawa | 2008-11-04 |
| 7264897 | Fuel cell system | Yuusuke Sato | 2007-09-04 |
| 7225111 | Monitoring apparatus | Kaoru Suzuki, Takashi Yoshimi, Daisuke Yamamoto, Nobuto Matsuhira | 2007-05-29 |
| 7104114 | Electronic equipment and fuel cell for the same | Katsumi Hisano, Eiichi Sakaue, Tomonao Takamatsu, Hideo Iwasaki | 2006-09-12 |
| 6907388 | Monitoring apparatus | Kaoru Suzuki, Takashi Yoshimi, Daisuke Yamamoto, Nobuto Matsuhira | 2005-06-14 |
| 6103177 | Mastering apparatus for recording onto a glass master and method for recording onto a glass master | Jun Nishida | 2000-08-15 |
| 5825730 | Mastering machine having non-repetitive runout compensation | Jun Nishida, Yuuichi Tachikawa | 1998-10-20 |
| 5398271 | Exposure apparatus | Jun Nishida, Norio Uchida | 1995-03-14 |
| 5323712 | Table moving apparatus | — | 1994-06-28 |
| 5299251 | Exposure apparatus | Yoriyuki Ishibashi, Takahiro Murata | 1994-03-29 |
| 5179863 | Method and apparatus for setting the gap distance between a mask and a wafer at a predetermined distance | Norio Uchida | 1993-01-19 |
| 5134640 | Synchrotron radiation apparatus | Toshio Hirokawa, Norio Uchida, Osamu Kuwabara | 1992-07-28 |
| 5130747 | Carrier apparatus | Norio Uchida | 1992-07-14 |